4. Material or article handling
  5. Apparatus for moving material between zones having different...
  6. For carrying standarized mechanical interface type

Hatsuo Osada

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Semiconductor processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Transfer apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Vacuum processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Vacuum processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-140994

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