Transfer apparatus

Details Transfer apparatus Transfer apparatus

1992-07-29

1994-08-02

Underwood, Donald W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

74 107, 74 96, 74479BF, 74489BJ, 414222, 4147445, 4147446, 414749, 414917, 414935, 414939, 901 21, 901 28, B25J 2100

Patent

active

053339860

ABSTRACT:
A transfer apparatus for transferring a semiconductor wafer has a base provided with a rotary driving source, and four arms having the same length. A first inner arm has an end fixed to the rotary driving shaft, and the other end fixed to a first coupling shaft. A second inner arm has an end supported by the base such that it can rotate about a pivotal point, and the other end is rotatably connected to a second coupling shaft. A transmission mechanism is provided between the first and second coupling shafts. A first outer arm has an end rotatably connected to the first coupling shaft, and a second outer arm has an end fixed to the second coupling shaft. The other ends of the first and second outer arms are rotatably connected to a supporting plate having a wafer-holding portion. The four arms are arranged so as to have a link structure in the form of a parallelogram, which enables linear transfer of a wafer.

REFERENCES:
patent: 2477252 (1949-07-01), Hutchings
patent: 4596377 (1986-06-01), Taylor
patent: 4702668 (1987-10-01), Carlisle et al.
patent: 4749330 (1988-06-01), Hine
patent: 4909701 (1990-03-01), Hardegen
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4990047 (1991-02-01), Wagner et al.
patent: 5151008 (1992-09-01), Ishida et al.

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