4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Haruo Tsuchikawa

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Deflection system in an electron beam exposure device

Communications: electrical – Audible indication – Percussion-type sound producer
Patent

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Electron beam exposure apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Method and apparatus for an electron beam exposure system

Boots – shoes – and leggings
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Scanning electron beam exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Scanning electron beam exposure system

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-282001

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