Deflection system in an electron beam exposure device

Details Deflection system in an electron beam exposure device Deflection system in an electron beam exposure device

1983-09-27

1986-04-15

Dobeck, B.

Communications: electrical

Audible indication

Percussion-type sound producer

340347M, H03K 1302

Patent

active

045830770

ABSTRACT:
In a D/A converter in a deflection system of an electron beam exposure device, the most significant bits (m bits) of input digital data consisting of n bits are input into a decoder circuit, and 2.sup.m D/A converters which correspond to the m bits are provided. The data consisting of the least significant bits (n-m bits) is input into the 2.sup.m D/A converters via 2.sup.m gates, respectively. The decoder circuit is constructed so as to control the 2.sup.m gates so that when the content of the data of the m bits is S, the first to S-th data of the 2.sup.m D/A converters is all rendered to be "1", the data of the (S+1)-th D/A converter remains the same as the data of the n-m bits, and the data of the (S+2)-th and subsequent D/A converters is all rendered to be "0", the sum of the outputs of the 2.sup.m D/A converters being applied to a coil which deflects the electron beam.

REFERENCES:
patent: 4412208 (1983-10-01), Akazawa
patent: 4430642 (1984-02-01), Weigand et al.
patent: 4503421 (1985-03-01), Hareyama et al.

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