Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
Inventor
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Dry-etch of indium and tin oxides with C2H5I gas
Enhanced stripping of low-k films using downstream gas mixing
Etching aluminum over refractory metal with successive plasmas
Fluorine process for cleaning semiconductor process chamber
Photoresist strip method for low-k dielectrics
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