4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Total dielectric isolation

Harry Chuang

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Chemical mechanical polishing (CMP) method for gate last...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Contact scheme for MOSFETs

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Controlling gate formation by removing dummy gate structures

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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Device scheme of HKMG gate-last process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Dishing-free gap-filling with multiple CMPs

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Profile ID: LFUS-PAI-P-2212139

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