Valves and valve actuation
Reciprocating valve
Diaphragm
Inventor
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Device for capacitive pressure measurement and method for...
Device for capacitive pressure measurement and method for...
Method and apparatus for supplying energy to sensors
Method of anisotropically etching monocrystalline, disk-shaped w
Method of making micromechanical components
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Profile ID: LFUS-PAI-P-46408