4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Gregory J. Goldspring

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Method and apparatus for simulating standard test wafers

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for simulating standard test wafers

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Methods and apparatuses for improving photoresist selectivity an

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Post-metal etch treatment to prevent corrosion

Metal treatment – Process of modifying or maintaining internal physical... – Processes of coating utilizing a reactive composition which...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1018751

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