4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Gill Yong Lee

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Disposable spacers for improved array gapfill in high...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Endpoint detection method and apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hard etch mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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High density plasma CVD process for making dielectric anti-refle

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Integration scheme for avoiding plasma damage in MRAM...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
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Profile ID: LFUS-PAI-P-176610

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