4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Stacked capacitor

Gi-Vin Im

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Method of forming material using atomic layer deposition and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of forming material using atomic layer deposition and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method of forming material using atomic layer deposition and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of forming oxide layer using atomic layer deposition...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3001492

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