4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Gerald W. Gibson, Jr.

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High-density field emission elements and a method for...

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Hydrogenated silicon carbide as a liner for self-aligning...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method and structure for controlling plasma uniformity

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Method for controlling trench depth in shallow trench...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Including isolation structure
Reexamination Certificate

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Protruding spacers for self-aligned contacts

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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