Protruding spacers for self-aligned contacts

Details Protruding spacers for self-aligned contacts Protruding spacers for self-aligned contacts

2006-10-24

2006-10-24

Lee, Hsien-Ming (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S750000, C257S751000, C438S592000, C438S595000, C438S652000, C438S655000

Reexamination Certificate

active

07126198

ABSTRACT:
A protruding spacer that protrudes above the top surface of a gate electrode structure provides enhanced resistance to exposure of the gate electrode during the etch process used to form self-aligned contacts. The protruding spacer may be formed using an amorphous carbon sacrificial layer as the top layer of the patterned gate electrode structure. Dielectric spacers are formed alongside the gate electrode structure, including alongside the sacrificial amorphous carbon layer. The dielectric spacers extend substantially to the top of the amorphous carbon layer. The amorphous carbon layer is then removed such that the remaining gate structure includes dielectric spacers that have a protruding section that protrudes above the top surface of the remaining gate structure. A nitride layer may be formed over the gate structure. Such a structure prevents exposure of the gate electrode during the formation of self-aligned contacts, and shorting, once the contact openings are filled.

REFERENCES:
patent: 5089434 (1992-02-01), Hollinger
patent: 6096642 (2000-08-01), Wu
patent: 6114209 (2000-09-01), Chu et al.
patent: 6121096 (2000-09-01), Hopper
patent: 2002/0079548 (2002-06-01), Hu
patent: 2002/0102430 (2002-08-01), Shirahata

Affiliated with

Also associated with

Rating

Protruding spacers for self-aligned contacts does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Protruding spacers for self-aligned contacts, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Protruding spacers for self-aligned contacts will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3718803