4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

George R. Koch

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Adjustable electrode plasma processing chamber

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Chamberless substrate handling

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Method and apparatus for SEM specimen coating and transfer

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Modular loadlock

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Scanning electron microscope architecture and related...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate

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Profile ID: LFUS-PAI-P-404752

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