Method and apparatus for SEM specimen coating and transfer

Details Method and apparatus for SEM specimen coating and transfer Method and apparatus for SEM specimen coating and transfer

1974-09-05

1976-05-18

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250311, 250440, G21K 506

Patent

active

039581241

ABSTRACT:
An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing. The coating apparatus has a shuttle rotating platform and a removable oscillating filament assembly for enabling deposition of a layer of electrically conductive material on the specimen surface at the SEM site. A heat conducting path provides shuttle cooling in the main chamber to maintain a frozen specimen at a low temperature. The entrance flange is coupled to a vacuum pump to permit independent evacuation and backfilling of the airlock chamber in order to eliminate main chamber pressurization during specimen transfer.

REFERENCES:
patent: 3150259 (1964-09-01), Wilska
patent: 3185840 (1965-05-01), Lemaitre
patent: 3405264 (1968-10-01), Fairbanks et al.
patent: 3419717 (1968-12-01), Mills
patent: 3426193 (1969-02-01), Guernet

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