Modular loadlock

Details Modular loadlock Modular loadlock

1981-02-13

1984-02-28

Sheridan, Robert G.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

49 68, 49254, 220331, 414222, 414744R, C23C 1308

Patent

active

044339518

ABSTRACT:
A loadlock apparatus for a workpiece processing chamber such as those incorporated in vacuum processing systems. The apparatus includes an isolation chamber having evacuation apertures and workpiece transfer apertures with independently operable doors for closing and sealing the workpiece transfer apertures and an independent operable workpiece transfer mechanism. The doors and workpiece transfer mechanisms may be contained within the isolation chamber and the chamber may be closed and sealed while containing a workpiece. The door and workpiece transfer mechanisms may be adapted such that they are not positioned over the workpiece, thereby reducing the possibility of workpiece particulate contamination.
The preferred embodiment of the workpiece transfer mechanism moves a workpiece through the isolation chamber along a path which is essentially a straight line. An alternative embodiment of this transfer mechanism permits positioning the workpiece at any point lying on or within a circular radius of a fixed point within the isolation chamber. This alternative embodiment can further move the workpiece to any such point along an arbitrarily chosen planar path lying within this positioning circle.

REFERENCES:
patent: Re25889 (1965-10-01), Willsea
patent: 3656454 (1972-04-01), Schrader
patent: 3874525 (1975-04-01), Hassan et al.

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