4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Base supplied constituent

Georg Roters

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Device and method for thermally treating semiconductor wafers

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate

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Method and apparatus for the production of process gas that...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Method for minimizing the vapor deposition of tungsten oxide...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having junction gate
Reexamination Certificate

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Method for thermally treating a substrate that comprises...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate

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Method of forming and/or modifying a dielectric film on a...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Profile ID: LFUS-PAI-P-1249161

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