4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Gayle W. Miller

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Circuit isolation utilizing MeV implantation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Isolation by pn junction only
Reexamination Certificate

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Circuit isolation utilizing MeV implantation

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated...
Reexamination Certificate

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Copper contamination control of in-line probe instruments

Chemistry: analytical and immunological testing – Metal or metal containing – Cu – ag – au
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DMOS device with sealed channel processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Dual gate oxide process for deep submicron ICS

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-207207

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