4. Semiconductor device manufacturing: process
  5. Electron emitter manufacture

Francis J. Koszyk

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Chemical-mechanical polishing composition and method for...

Compositions – Etching or brightening compositions
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Chemical-mechanical polishing of metals in an oxidized form

Abrading – Abrading process – Glass or stone abrading
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CMP of copper/ruthenium substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Composition and method for damascene CMP

Etching a substrate: processes – Mechanically shaping – deforming – or abrading of substrate – Nongaseous phase etching
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Composition and method for polishing...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2167807

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