4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Eric A. Joseph

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Etching of tungsten selective to titanium nitride

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Phase change material with filament electrode

Semiconductor device manufacturing: process – Making passive device – Resistor
Reexamination Certificate

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Phase change memory cell with electrode

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate

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Phase change memory device with plated phase change material

Semiconductor device manufacturing: process – Having selenium or tellurium elemental semiconductor component – Direct application of electrical current
Reexamination Certificate

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Phase change memory with tapered heater

Active solid-state devices (e.g. – transistors – solid-state diode – Bulk effect device – Bulk effect switching in amorphous material
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Profile ID: LFUS-PAI-P-2170266

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