4. Image analysis
  5. Applications
  6. Manufacturing or product inspection

Engelbertus Antonius Fransiscus Van Der Pasch

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Device and method for manipulation and routing of a...

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate

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Displacement measurement systems lithographic apparatus and...

Optics: measuring and testing – By light interference – For dimensional measurement
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Integrated plane mirror and differential plane mirror...

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Focus or magnification control
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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Illumination systems or details
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Profile ID: LFUS-PAI-P-2302913

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