Integrated plane mirror and differential plane mirror...

Details Integrated plane mirror and differential plane mirror... Integrated plane mirror and differential plane mirror...

2003-11-25

2008-10-28

Turner, Samuel A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07443511

ABSTRACT:
A lithographic interferometer system includes a beam generating mechanism, mirrors which reflect those beams, and detection devices configured to detect an interference pattern of overlapping reflected beams. The beam generating mechanism includes a beam-splitter, which splits the beams into reference beams and measuring beams, a reference mirror that provides a plane mirror interferometer, and a reflective surface that emits at least one reference beam used in a differential plane mirror interferometer.

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