Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate
2007-02-13
2007-02-13
Cherry, Euncha P. (Department: 2872)
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
C359S834000
Reexamination Certificate
active
10793420
ABSTRACT:
A lithographic projection apparatus is equipped with a device for manipulation and routing of at least one portion of a metrology beam of radiation. The device includes a first and a second optical wedge, wherein the second optical wedge and the first optical wedge having a relative position with respect to each other. The at least one portion of the metrology beam enters the device along an incoming optical axis at a first major surface of the first optical wedge, passes through the first and second optical wedges, and exits at a second major surface of the second optical wedge. The first and second optical wedges are arranged to at least one of rotate and translate the at least one portion of the metrology beam relative to the incoming optical axis by changing the relative position of the first and the second optical wedges.
REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5309212 (1994-05-01), Clark
patent: 5523193 (1996-06-01), Nelson
patent: 5535041 (1996-07-01), Ayral et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6252667 (2001-06-01), Hill et al.
patent: 6778280 (2004-08-01), De Groot et al.
patent: 2001/0046345 (2001-11-01), Snyder et al.
patent: 2001/0050821 (2001-12-01), Bickleder et al.
patent: 2000-314609 (2000-11-01), None
patent: 2001-42223 (2001-02-01), None
patent: 2002-164268 (2002-06-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/40791 (1998-09-01), None
Marshall, F. Gerald, Risley Prism Scan Patterns, Jul. 21, 1999, Part of SPIE Conference on Optical Scanning: Design and Application Denver, Colorado, Jul. 1999 SPIE vol. 3787, pp. 74 and 75.
Risley Prisms to Control Wave-Front Tilt and Displacement in a Vectorial Shearing Interferometer, pp. 1381-1384, Mar. 1, 2002.
Risley Prism Scan Patterns, pp. 74-86, Jul. 21, 1999.
European Search Report dated Dec. 17, 2003.
Beems Marcel Hendrikus Maria
Eussen Emiel Jozef Melanie
Klijntunte Engelbertus Johannes Jeroen
Van Der Pasch Engelbertus Antonius Fransiscus
ASML Netherlands B.V.
Cherry Euncha P.
Pillsbury Winthrop Shaw & Pittman LLP
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