4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Emmanuil H. Lingunis

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Alignment marks with salicided spacers between bitlines for...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Bitline hard mask spacer flow for memory cell scaling

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Isolation by pn junction only
Reexamination Certificate

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Method of fabricating a planar structure charge trapping...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Pocket implant for complementary bit disturb improvement and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Recessed channel

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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