4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By implanting or irradiating

Edward C. Cooney, III

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Damascene interconnect structures including etchback for...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate

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Device and methodology for reducing effective dielectric...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Exposed pore sealing post patterning

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Fluorine barrier layer between conductor and insulator for degra

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
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Fluorine barrier layer between conductor and insulator for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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