4. Data processing: measuring, calibrating, or testing
  5. Measurement system in a specific environment
  6. Mechanical measurement system

Dror Shemesh

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Apparatus and method for enhanced voltage contrast analysis

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate

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Charged particle beam apparatus and method for operating a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Charged particle detector assembly, charged particle beam...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Method and apparatus for sample formation and microanalysis...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and device for aligning a charged particle beam column

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Profile ID: LFUS-PAI-P-2260371

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