Method and device for aligning a charged particle beam column

Details Method and device for aligning a charged particle beam column Method and device for aligning a charged particle beam column

2007-09-18

2007-09-18

Kim, Robert (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S310000, C250S491100

Reexamination Certificate

active

10492574

ABSTRACT:
The invention provides a method for automatically aligning a beam of charged particles with an aperture. Thereby, the beam is defelcted to two edges of the aperture. From the signals required to obtain an extinction, a correction deflection field is calculated. Furter, a method for automatically aligning a beam of charged particles with an optical axis is provided. Thereby a defocusing is introduced and a signal calculated based on an introduced image shift is applied to a deflection unit. Further, a method for correction of the astigmatism is provided. Thereby the sharpness is evaluated for a sequence of frames measured whilst varying the signals to a stigmator.

REFERENCES:
patent: 4423305 (1983-12-01), Pfeiffer
patent: 4451737 (1984-05-01), Isakozawa
patent: 4618766 (1986-10-01), Van der Mast et al.
patent: 5258617 (1993-11-01), Kaneyama et al.
patent: 5359197 (1994-10-01), Komatsu et al.
patent: 5414261 (1995-05-01), Ellisman et al.
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 5627373 (1997-05-01), Keese
patent: 6067164 (2000-05-01), Onoguchi et al.
patent: 2004/0264764 (2004-12-01), Kochi et al.
patent: 2005/0006598 (2005-01-01), Pearl
patent: 2005/0061972 (2005-03-01), Kochi et al.
patent: 2005/0133718 (2005-06-01), Miyamoto et al.
patent: 1 202 320 (2002-05-01), None
patent: 1 302 971 (2003-04-01), None
patent: 61-004140 (1986-01-01), None
patent: 61-294745 (1986-12-01), None
patent: 02-234336 (1990-09-01), None
patent: 03-194839 (1991-08-01), None
patent: 05-266840 (1993-10-01), None
patent: 10-269975 (1998-10-01), None
patent: 2000-048749 (2000-02-01), None
PCT Search Report; International Application No. PCT/IB/02/05119 dated Nov. 30, 2004.
Japanese Office Action (Patent Application No. P2003-535230, Dated Nov. 11, 2005).
European Search Report for EP Application No. 02016838.1-2208, filed Mar. 6, 2006.

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