Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-10-24
2010-11-23
Vanore, David A. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S398000, C250S306000
Reexamination Certificate
active
07838830
ABSTRACT:
A charged particle beam apparatus is provided, which comprises a charged particle beam column for generating a primary charged particle beam; a focusing assembly, such as a charged particle lens, e.g., an electrostatic lens, for focusing the primary charged particle beam on a specimen; a detector for detecting charged signal particles which are emerging from the specimen; and a deflector arrangement for deflecting the primary charged particle beam. The deflector arrangement is arranged downstream of the focusing assembly and is adapted for allowing the charged signal particles passing therethrough. The detector is laterally displaced with respect to the optical axis in a deflection direction defined by the post-focusing deflector arrangement.
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Extended European Search Report dated Sep. 25, 2007.
Banzhof Helmut
Frosien Juergen
Levin Jacob
Shemesh Dror
ICT Integrated Circuit Testing Gesellschaft, fur Halbleiterpruft
Johnston Phillip A.
Patterson & Sheridan LLP
Vanore David A.
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