4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Douglas Keil

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Adjustable height PIF probe

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Apparatus for measuring a set of electrical characteristics...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
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Apparatus for measuring a set of electrical characteristics...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
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Mechanism for bow reduction and critical dimension control...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method and apparatus to detect fault conditions of plasma...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2024620

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