Adjustable height PIF probe

Details Adjustable height PIF probe Adjustable height PIF probe

2011-01-11

2011-01-11

Vo, Tuyet Thi (Department: 2821)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C156S345250, C156S345240, C156S345300, C156S345150, C118S7230IR, C118S7230IR, C118S7230ER, C118S7230ER

Reexamination Certificate

active

07867355

ABSTRACT:
A plasma probe assembly for use in a plasma processing chamber is provided. A semiconductor probe element with a probe surface at a first end of the semiconductor probe element is provided. An electrical connector is electrically connected to the semiconductor probe element. An electrically insulating sleeve surrounds at least part of the probe element. An adjustment device is connected to the semiconductor probe so that the probe surface is coplanar with an interior chamber surface of the plasma processing chamber.

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Office Action dated May 13, 2008 in U.S. Appl. No. 11/377,074.
Notice of Allowance dated Sep. 15, 2008 in U.S. Appl. No. 11/377,074.

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