Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – Frequency of cyclic current or voltage
Reexamination Certificate
2008-01-15
2008-01-15
Wells, Nikita (Department: 2881)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
Frequency of cyclic current or voltage
C324S076110, C324S076650, C324S076670, C250S492200, C356S316000
Reexamination Certificate
active
07319316
ABSTRACT:
A probe apparatus configured to measure a set of electrical characteristics in a plasma processing chamber, the plasma processing chamber including a set of plasma chamber surfaces configured to be exposed to a plasma is disclosed. The probe apparatus includes a collection disk structure configured to be exposed to the plasma, whereby the collection disk structure is coplanar with at least one of the set of plasma chamber surfaces. The probe apparatus also includes a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers, wherein the set of electrical characteristics is generated by an ion flux of the plasma. The probe apparatus further includes an insulation barrier configured to substantially electrically separate the collection disk and the conductive path from the set of plasma chamber surfaces.
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Hudson Eric
Keil Douglas
Kimball Christopher
Marakhtanov Alexei
Hashmi Zia R.
IP Strategy Group PC
Lam Research Corporation
Wells Nikita
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