4. Coating apparatus
  5. Gas or vapor deposition

Dien-Yeh Wu

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Apparatus and method for hybrid chemical processing

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for hybrid chemical processing

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for hybrid chemical processing

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and method for hybrid chemical processing

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Apparatus and process for plasma-enhanced atomic layer...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2398158

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