Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
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Adhesion of tungsten nitride films to a silicon surface
Adhesion of tungsten nitride films to a silicon surface
Method for improving process control and film conformality...
Vapor deposition of metal oxides, silicates and phosphates,...
Vapor deposition of silicon dioxide nanolaminates
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