Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Chemical vapor deposition reactor with infrared reflector
Gas flow system for CVD reactor
High voltage silicon diode with optimum placement of silicon-ger
Low cost method of fabricating epitaxial semiconductor devices
Low cost method of fabricating shallow junction, Schottky semico
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