4. Electric heating
  5. Metal heating
  6. By arc

Dean J. Larson

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Gas distribution system with tuning gas

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Quartz guard ring centering features

Electric heating – Metal heating – By arc
Reexamination Certificate

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Quartz guard ring centering features

Electric heating – Metal heating – By arc
Reexamination Certificate

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Uniform etch system

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Uniform etch system

Etching a substrate: processes – Gas phase etching of substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2290863

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