Quartz guard ring centering features

Details Quartz guard ring centering features Quartz guard ring centering features

2011-01-25

2011-01-25

Paschall, Mark H (Department: 3742)

Electric heating

Metal heating

By arc

C219S121400, C219S121440, C219S121590, C118S7230AN, C156S345340

Reexamination Certificate

active

07875824

ABSTRACT:
An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.

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International Search Report and Written Opinion dated Mar. 24, 2008 for PCT/US2007/021629.

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