Quartz guard ring centering features

Electric heating – Metal heating – By arc

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C219S121400, C219S121440, C219S121590, C118S7230AN, C156S345340

Reexamination Certificate

active

07875824

ABSTRACT:
An electrode assembly and method of centering an outer ring around an electrode assembly in a plasma reaction chamber used in semiconductor substrate processing. The method includes positioning the outer ring around an outer surface of a backing member of the electrode assembly, and inserting at least one centering element between the outer ring and the backing member. The centering element can be a plurality of spring-loaded centering elements received in a cavity on the outer surface of the backing member, the centering elements having a first end adapted to contact the outer ring and a second end adapted to receive a spring. The outer ring surrounds an outer surface of the backing member, such that the plurality of spring-loaded centering elements are positioned between the outer surface of the backing member and an inner surface of the outer ring.

REFERENCES:
patent: 5074456 (1991-12-01), Degner et al.
patent: 5534751 (1996-07-01), Lenz et al.
patent: 5997962 (1999-12-01), Ogasawara et al.
patent: 6073577 (2000-06-01), Lilleland et al.
patent: 6824627 (2004-11-01), Dhindsa et al.
patent: 6838012 (2005-01-01), Lenz
patent: 6890861 (2005-05-01), Bosch
patent: 7244311 (2007-07-01), Fischer
patent: 7267741 (2007-09-01), Ren
patent: 7645341 (2010-01-01), Kennedy et al.
patent: 17-019508 (2005-01-01), None
International Search Report and Written Opinion dated Mar. 24, 2008 for PCT/US2007/021629.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Quartz guard ring centering features does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Quartz guard ring centering features, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Quartz guard ring centering features will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2698088

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.