4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

David S. Becker

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Etchant and method of use

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Etchant and method of use

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Fuse structures

Active solid-state devices (e.g. – transistors – solid-state diode – Gate arrays – With particular signal path connections
Reexamination Certificate

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Gas pulsing for etch profile control

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Highly selective nitride spacer etch

Stock material or miscellaneous articles – Composite – Of silicon containing
Patent

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Profile ID: LFUS-PAI-P-792528

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