Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
Inventor
active
Deposition of silicon dioxide and silicon oxynitride films using
Deposition of silicon nitride films from azidosilane sources
Deposition of silicon oxide films using alkylsilane liquid sourc
Method for deposition of silicon films from azidosilane sources
Method of forming a gate stack containing a gate dielectric...
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Profile ID: LFUS-PAI-P-51534