4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Electrical characteristic sensed

David Bang

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Air voids underneath metal lines to reduce parasitic capacitance

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Electron bean curing of low-k dielectrics in integrated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Utility Patent

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Method and apparatus for estimating resistance and...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Reexamination Certificate

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Method for quantifying ultra-thin dielectric reliability: time d

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Electrical signal parameter measurement system
Patent

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Method of improving MOS device performance by controlling...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-359322

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