4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Cynthia B. Brooks

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Integrated phase angle and optical critical dimension...

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Multi-step process for etching photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Multi-step process for etching photomasks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Oxide plasma etching process with a controlled wineglass shape

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Selective plasma etching of silicon nitride in presence of silic

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-60580

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