4. Coating apparatus
  5. Gas or vapor deposition

Clifton Anderson

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Double-dome reactor for semiconductor processing

Coating processes – Coating by vapor – gas – or smoke
Patent

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Pressure-resistant thermal reactor system for semiconductor proc

Coating apparatus – Gas or vapor deposition – With treating means
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Reactant gas injection for IC processing

Coating apparatus – Gas or vapor deposition
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Semiconductor wafer transfer in processing systems

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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