4. Semiconductor device manufacturing: process
  5. Bonding of plural semiconductor substrates
  6. Subsequent separation into plural bodies

Chung Foong Tan

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Avoiding plasma charging in integrated circuits

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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End of range (EOR) secondary defect engineering using...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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End of range (EOR) secondary defect engineering using...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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End of range (EOR) secondary defect engineering using...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Integrated circuit system employing grain size enlargement

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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