4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Christopher F. Lyons

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Amorphous carbon absorber/shifter film for attenuated phase...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Antireflective coating films

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
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Bi-layer trim etch process to form integrated circuit gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Bright field image reversal for contact hole patterning

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Carbonization process for an etch mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-189526

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