Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – At least one aryl ring which is part of a fused or bridged...
Patent
1997-05-27
1998-04-28
Jagannathan, Vasu
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
At least one aryl ring which is part of a fused or bridged...
524164, 524165, 524319, 524462, 524463, 524503, 524545, 524546, 430273, C08L 2712
Patent
active
057445370
ABSTRACT:
Enhanced fidelity of pattern transfer of aqueous developable photoresist compositions is achieved with top antirefective coatings which are fluorine-containing and have a refractive index approximately equal to the square root of the underlying photoresist and which are removable in the developer for the photoresist.
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Brunsvold William R.
Hefferon George J.
Lyons Christopher F.
Moreau Wayne M.
Wood Robert L.
Capella Steven
Guarriello John J.
International Business Machines - Corporation
Jagannathan Vasu
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