4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Multiple layers

Christophe F. Pomarede

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Integration of high k gate dielectric

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Low temperature silicon compound deposition

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Method to form ultra high quality silicon-containing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Method to form ultra high quality silicon-containing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Remote plasma activated nitridation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2239138

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