4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Christoph Schwan

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Method for enhancing shallow trench top corner rounding...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for formation of a differential offset spacer

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method for patterning contact etch stop layers by using a...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Method of adjusting etch selectivity by adapting aspect...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of compensating for etch rate non-uniformities by ion...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2428354

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