4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Christian Dussarrat

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Deposition of Ta- or Nb-doped high-k films

Coating processes – Coating by vapor – gas – or smoke
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Hexakis(monohydrocarbylamino) disilanes and method for the...

Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
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Hexakis(monohydrocarbylamino)disilanes and method for the...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
Reexamination Certificate

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Metal precursors for deposition of metal-containing films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method for depositing silicon nitride films and silicon...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Profile ID: LFUS-PAI-P-2189023

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