4. Photocopying
  5. Projection printing and copying cameras
  6. Illumination systems or details

Chris A. Mack

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Measuring phase errors on phase shift masks

Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate

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Method and mark for metrology of phase errors on phase shift...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method for determining and correcting reticle variations

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method for determining lithographic focus and exposure

Optics: measuring and testing – Lens or reflective image former testing – Focal length measuring
Reexamination Certificate

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Method for monitoring a reticle

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1673158

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