Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-07-11
2006-07-11
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237100, C356S399000, C382S144000, C382S145000
Reexamination Certificate
active
07075639
ABSTRACT:
A method of inspecting a phase shift mask is disclosed. The method includes receiving a mask having an alternating phase shift pattern. The method also includes forming the alternating phase shift pattern on a wafer. The method further includes analyzing the alternating phase shift pattern on the wafer to determine the phase difference of the alternating phase shift pattern.
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Adel Michael
Ghinovker Mark
Mack Chris A.
Beyer Weaver & Thomas LLP
KLA-Tencor Technologies Corporation
Lauchman Layla G.
Stock, Jr. Gordon J.
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