Optics: measuring and testing – Lens or reflective image former testing – Focal length measuring
Reexamination Certificate
2008-04-11
2010-02-02
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
Lens or reflective image former testing
Focal length measuring
C356S124000, C356S601000, C356S625000, C356S636000
Reexamination Certificate
active
07656512
ABSTRACT:
A method for determining one or more process parameter settings of a photolithographic system is disclosed.
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Dziura Thaddeus G.
Levy Ady
Mack Chris A.
Mieher Walter D.
Chowdhury Tarifur
KLA-Tencor Technologies Corporation
Stock, Jr. Gordon J
Weaver Austin Villeneuve & Sampson LLP
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