4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Chishio Koshimizu

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Capacitive coupling plasma processing apparatus and method...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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End point detecting method for semiconductor plasma processing

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Etching process

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Method and apparatus for measuring electron density of...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Method and apparatus for measuring electron density of...

Optics: measuring and testing – With plural diverse test or art
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Profile ID: LFUS-PAI-P-464086

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